Четырехсенсорная газовая микросистема на подложке из пористого анодного оксида алюминия: конструкция, технология, моделирование

Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method.