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The Performances and Challenges of Today's EB Lithography and EB-resist Materials
The Performances and Challenges of Today's EB Lithography and EB-resist Materials
2014
Masato Saito
Kunihiro Ugajin
Keisuke Yagawa
Machiko Suenaga
Yoshihito Kobayashi
Keywords:
Nanotechnology
Lithography
Materials science
Resist
Correction
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