Parallel adjusting mechanism and inspecting device of probe card

The invention provides a parallel adjusting mechanism of a probe card. The mechanism can acquire a proper overdrive amount and a stable probe trace, and can use a general top plate. The parallel adjusting mechanism of the probe card can elevate the top plate (15) via four positions of support columns (16) arranged at four positions of a four-corner support top plate (15), and adjusts the parallelism between the probe card (12) and a chip W on a chip clamping (11) arranged bellow the probe card. The parallel adjusting mechanism includes an elevating mechanism (17A) arranged between the support columns (16) at four positions and the top plate (15). The elevating mechanism (17A) includes a movable substance (17C) which has an inclined plane and can move along top surfaces of the support columns (16), an elevating substance (17E) which is connected with the top plate (15) and can move up and down along the inclined plane of the movable substance (17C), and a driving mechanism (17F) which moves the movable substance (17C) along the top surfaces of the support columns (16).