ROOM-TEMPERATURE DEPOSITION OF YTTRIA-STABILIZED ZIRCONIA BUFFER LAYER ON METALLIC SUBSTRATES BY LASER ABLATION

We investigated the deposition of YSZ buffer layers on polycrystalline metallic substrate at low temperature and low oxygen pressure. The (100) preferred orientation can be obtained in the YSZ films and was explained by the model of growth-based orientation selection. Optimizations of oxygen partial pressure and target distance were done to offer referable values for IBAD process.