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Acemap > Paper > 29p-YC-2 Arを混合した負性ガスRF放電の特性 : I CF_4/Ar 1 MHz放電の特性

29p-YC-2 Arを混合した負性ガスRF放電の特性 : I CF_4/Ar 1 MHz放電の特性

1995 
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