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Study on lapping Characteristics of Sapphire Substrate by Metal-Containing Porous Plate
Study on lapping Characteristics of Sapphire Substrate by Metal-Containing Porous Plate
2017
Kotaro Toyosawa
Takumu Takizawa
Weimin Lin
Tatsuya Shikano
Takeshi Abe
Keywords:
Lapping
Substrate (chemistry)
Sapphire
Porosity
Composite material
Materials science
Metal
sapphire substrate
Correction
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