Helium microprobe analysis of nickel silicide diodes

Abstract In this paper we present RBS and channelling measurements made on microscopic nickel silicide diode structures. These were obtained by using the helium ion microprobe at the University of Surrey. We also show that the new pre-lens deflection system enables measurements to be made with a 10 μm diameter probe over a 2 × 2 mm area without significant dechannelling or increase in the probe's diameter.