Freestanding Sensor-Based 3ω Technique for Thermal Conductivity Measurement of Solids

A freestanding sensor based on 3ωtechnique was designed and fabricated.The principle and measurement method for thermal conductivity characterization of solids using this freestanding sensor-based 3ωtechnique was proposed.Compared with the conventional 3ωtechnique,the service life of the sensor is improved and the smooth surface of the specimen is no longer needed.Furthermore, the nondestructive thermal conductivity characterization for specimens based on the 3ωtechnique is first realized.Experimental results indicated the freestanding sensor-based 3ωtechnique owns good accuracy for the thermal conductivity measurement for solid bulks and hundreds of microns thick wafers.This new technique has potential application value in the thermal conductivity measurement where the conventional 3ωtechnique is not applicable as samples with porous structures.