Gas analyzer and gas processing apparatus

2015 
A gas analyzer according to one embodiment of the present invention comprises a cell unit, a light source unit, a detection unit and a control unit. The cell unit comprises a cell. The cell comprises a space into which a sample gas containing an object substance that contains a fluoride is introduced. The light source unit has measurement light that has a variable wavelength incident on the sample gas introduced into the space. The detection unit detects the measurement light discharged from the cell unit. The control unit determines the concentration of the object substance contained in the sample gas on the basis of the detection result of the measurement light detected by the detection unit. The light source unit comprises a laser element part that discharges the measurement light, a first adjustment part which roughly adjusts the wavelength, and a second adjustment part which finely adjusts the wavelength.
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