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Dry Etching Solutions to Contact Etch for Advanced Logic Technologies
Dry Etching Solutions to Contact Etch for Advanced Logic Technologies
2013
Xinpeng Wang
Jing-Yong Huang
Yi Huang
Qiu-Hua Han
Hai-Yang Zhang
Keywords:
Dry etching
Reactive-ion etching
Composite material
Materials science
Optoelectronics
Correction
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