Cluster jet processing method, semiconductor devices, micro-electromechanical devices, and optical components

A electrically to provide a sample processing method using a neutral reactive cluster. A and the reactive gas, a mixed gas from the reaction gas consisting of low-boiling gases, a pressure in the range which does not liquefy, jetted while adiabatically expanded in a predetermined direction, generates a reactive cluster, the reactive cluster injected into the sample in the vacuum processing chamber for processing a sample surface.