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Angle resolved XPS analysis of surface region defects in rapid thermal annealed antimony implanted silicon.
Angle resolved XPS analysis of surface region defects in rapid thermal annealed antimony implanted silicon.
1990
Kumar S. N
G. Chaussemy
Laugier A
Bruno Canut
M. Charbonnier
Keywords:
Analytical chemistry
X-ray photoelectron spectroscopy
Thermal
Antimony
Silicon
Materials science
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