Microrobotic Station for Nano-Optical Component Assembly

Compact photonic structures have strategic importance in several fields. In order to fabricate more complex structures with optimized optical function, robotic nano-assembly is a promising solution because it enables to integrate several types of materials from different fabrication processes into the same structure. This paper presents a microrobotic station which is designed for the assembly of nano-optical components. The robotic station has 8-DOF for positioning and 4-DOF microgripper with integrated force sensors to perform dexterous and accurate manipulation of components by considering both position and contact force to achieve precise alignment and parallelism of structures.