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Influence of Oxygen Source on the Ferroelectric Properties of ALD Grown Hf1-xZrxO2 Films
Influence of Oxygen Source on the Ferroelectric Properties of ALD Grown Hf1-xZrxO2 Films
2020
Rubén Alcalá
Claudia Richter
Monica Materano
Patrick D. Lomenzo
Chuanzhen Zhou
Jacob L. Jones
Thomas Mikolajick
Uwe Schroeder
Keywords:
Chemical engineering
Oxygen
Ferroelectricity
Materials science
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