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Composition Verification of AlGaAs Epitaxial Layers using Inductively Coupled Plasma Optical-Emission Spectroscopy
Composition Verification of AlGaAs Epitaxial Layers using Inductively Coupled Plasma Optical-Emission Spectroscopy
2003
Kristine A. Bertness
Todd E. Harvey
Albert J. Paul
Lawrence H. Robins
Gregory C. Turk
Therese A. Butler
Marc L. Salit
Keywords:
Epitaxy
Photoluminescence
Inductively coupled plasma
Materials science
Analytical chemistry
Emission spectrum
optical emission spectroscopy
Correction
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