For optical detection of biological entities
2013
The present invention relates to an optical detection of biological entities. The present disclosure describes an integrated semiconductor device and a method for handling and processing biological samples entities. Device includes a lower substrate, provided at least one optical signal conduit the lower substrate, at least one protective substrate is disposed on the lower bond pads, the protective member arranged to form a protective area (Protection is provided on at least one bonding pad) , microfluidic channel (wherein the lower substrate is formed on a first side of the microfluidic channel and the second side of the microfluidic channel is formed on the protective member), the photosensor array coupled to sensor control circuit, and a fluid control circuit, and a control logic circuit coupled to the sensor circuit.
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