NANO-MOIRE METHOD

Nano-moire method presented in this paper is an experimental tech-nique which allows direct measurement of nanoscopic mechanical parameters,such asdisplacement,strain and dislocation distribution.The basic idea is the formation ofmoire fringes when a HREM(high resolution electron microscopy)image of crystalmaterial is superimposed with a unidirectional grating.Fourier filtering technique isused to increase the contrast of fringes and to multiple the fringes.This method hasatom-size sensitivity and spatial resolution,and relatively large range.It providesa new experimental technique with very high sensitivity and spatial resolution fornanomechanics.