Mechanism of the current quenching phenomenon in pseudospark discharge

Yu.D. Korolev,O. B. Frants,V. G. Geyman,R.V. Ivashov,N. V. Landl,I. A. Shemyakin,K. Frank,Rainer Bischoff,M. Iberler,J. Urban

Mechanism of the current quenching phenomenon in pseudospark discharge

2002

Yu.D. Korolev
O. B. Frants
V. G. Geyman
R.V. Ivashov
N. V. Landl
I. A. Shemyakin
K. Frank
Rainer Bischoff
M. Iberler
J. Urban

Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed.

Keywords:

Materials science
Analytical chemistry
Experimental data
Pulse duration
Electronic engineering
Phenomenon
Ionization
Quenching
Extreme ultraviolet lithography
Cathode
Atomic physics
high current

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