Optimization of Structure of Large Format TES Arrays

We fabricated 16 times 16 format arrays of 180 mum square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO 2 and SiN x membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.