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Radio Frequency sputtered Si 1− x Ge x and Si 1− x Ge x O y thin films for uncooled infrared detectors
Radio Frequency sputtered Si 1− x Ge x and Si 1− x Ge x O y thin films for uncooled infrared detectors
2006
Mukti M Rana
Donald P. Butler
Keywords:
Detector
Silicon-germanium
Analytical chemistry
Activation energy
Materials science
Radio frequency
Temperature coefficient
Infrared
Infrared detector
Thin film
Correction
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