Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach

The final publication is available at Elsevier via https://dx.doi.org/10.1016/j.compchemeng.2018.08.029 © 2018. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/