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Impact of Iridium Oxide Electrodes on the Ferroelectric Phase of Thin Hf0.5Zr0.5O2 Films
Impact of Iridium Oxide Electrodes on the Ferroelectric Phase of Thin Hf0.5Zr0.5O2 Films
2021
Terence Mittmann
Thomas Szyjka
H. Alex Hsain
Marian Cosmin Istrate
Patrick D. Lomenzo
Lutz Baumgarten
Martina Müller
Jacob L. Jones
Lucian Pintilie
Thomas Mikolajick
Uwe Schroeder
Keywords:
Optoelectronics
Materials science
Hafnia
Electrode
Ferroelectricity
Iridium oxide
Hydrogen
Correction
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