Microarray manufacturing method

Providing a substrate having a discrete first microfeature having a first profile, by depositing a vapor deposition coating material on the first microfeature substantially different from the first profile and forming a second microfeature having a second profile, and to provide a method for manufacturing a microarray. Also it provides a method of forming a mold by adding a replication material deposition coated microfeature. Microarray prepared by this method can be used as a substrate for surface enhanced Raman spectroscopy (SERS).