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Determination of the Matrix Elements Concentration in TiNxOy Films by Auger Electron Spectroscopy
Determination of the Matrix Elements Concentration in TiNxOy Films by Auger Electron Spectroscopy
2019
V. S. Belov
E. P. Kirilenko
A. P. Sirotina
Keywords:
Auger electron spectroscopy
Analytical chemistry
Matrix (mathematics)
Materials science
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