The resist solution supply and recovery system

PROBLEM TO BE SOLVED: To provide a system for improving efficiency in the recycling of a resist liquid greatly as compared with before and improving the recycle rate of the resist liquid by reducing recycling costs. SOLUTION: The resist liquid supply/recycling system comprises: a resist liquid coating device, such as a spin coater 250; an exclusive vessel 1 that is a supply/recycling vessel having a prescribed capacity used for supplying a resist liquid to the resist liquid coating device and for recycling a used resist liquid from the resist liquid coating device; supply piping that is used when supplying a resist liquid and can be connected to the exclusive vessel 1 in an airtight state; and recycling piping 253 that is used when recycling a used resist liquid and can be connected to the exclusive vessel 1 in an airtight state. Therefore, recycling at a user side and the burden of facilities for recycling are not required, thus greatly reducing recycling expenses and labor. COPYRIGHT: (C)2009,JPO&INPIT