Positioning sensor with nanometric performances over centimetric range for nanotechnology sample-holders

Nowadays, nanometer resolution and accuracy in many nanotechnology processes are required. But accuracy is in general opposed with range. High resolution over a wide range has been made possible using interferometric translation stages, in other words by combining metrology with classical mechanical motions. The interferometry is obviously a good solution. Nevertheless, its sensitivity to the medium index and its price make it prohibited in many applications. In parallel of several works on interferometry, a lot of studies have been started to develop simple sensors or measurement systems gathering simplicity, high resolution over long range and low price potentialities [1–7].