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Application Of HCl Gas Phase Etch In The Production Of Novel Devices
Application Of HCl Gas Phase Etch In The Production Of Novel Devices
2008
Andriy Hikavyy
Rita Rooyackers
Peter Verheyen
Frederik Leys
Georgios Vellianitis
Mark Van Dal
Rob Lander
Roger Loo
Keywords:
Materials science
Chemical engineering
gas phase
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