Broadband antireflection film by glancing angle deposition

Abstract A broadband antireflection film was prepared with SiO2 by glancing angle deposition. The refractive index of the SiO2 film was tuned from 1.15 to 1.45 by adjusting the deposition angle. A novel broadband antireflection film was designed with the graded index film. The average reflectivity of antireflection film is less than 0.41% between 400 nm and 1800 nm wavelength range at 0° incident angle.