Method and device used for quantitative determination of oxidation film microdefects

The invention discloses a method used for quantitative determination of oxidation film microdefects. According to the method, quantitative characterization of microdefects in oxidation film is realized via measuring on pure electronic conduction current of the oxidation film, or electric current or impedance formed by migration of electrical resistance or ions into the oxidation film, and calculation of the difference and the value of ion migration current or impedance with electronic conduction current or electrical resistance. Beneficial effects are that: not only qualitative characterization but objective quantitative characterization of oxidation film microdefects, such as defect scale and distribution density, can be realized, distribution situation of microdetects on macroscale (10mm) can be reflected; sample preparation is not needed, direct measurement on samples can be realized; the method is convenient and fast; and influences caused by sample preparation and human factors are avoided.