Ti-Si-C-N Thin Films Grown by Reactive Arc Evaporation from Ti3SiC2 Cathodes

Anders Eriksson,Jianqiang Zhu,Naureen Ghafoor,Jens Jensen,Grzegorz Greczynski,Mats Johansson,Jacob Sjölén,Magnus Odén,Lars Hultman,Johanna Rosén

Ti-Si-C-N Thin Films Grown by Reactive Arc Evaporation from Ti3SiC2 Cathodes

2011

Anders Eriksson
Jianqiang Zhu
Naureen Ghafoor
Jens Jensen
Grzegorz Greczynski
Mats Johansson
Jacob Sjölén
Magnus Odén
Lars Hultman
Johanna Rosén

Ti-Si-C-N thin films were deposited onto WC-Co substrates by industrial scale arc evaporation from Ti3SiC2 compound cathodes in N2 gas. Microstructure and hardness were found to be highly dependent ...

Keywords:

Microstructure
Metallurgy
Thin film
Composite material
Evaporation
Materials science
Combustion chemical vapor deposition
Physical vapor deposition
Cathode
Carbon film
Arc (geometry)
Analytical chemistry

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