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GaN Surface Cleaning and In-situ formation of SiO 2 /GaN structure using Remote Plasma
GaN Surface Cleaning and In-situ formation of SiO 2 /GaN structure using Remote Plasma
2018
Noriyuki Taoka
Nguyen Xuan Truyen
Taishi Yamamoto
Akio Ohta
Hisashi Yamada
Tokio Takahashi
Mitsuhisa Ikeda
Katsunori Makihara
Seiichi Miyazaki
Mitsuaki Shimizu
Keywords:
Materials science
In situ
surface cleaning
Optoelectronics
Remote plasma
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