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Growth of Sc-Doped TiO 2 Thin Film by RF Magnetron Sputtering
Growth of Sc-Doped TiO 2 Thin Film by RF Magnetron Sputtering
2011
Kazuya Tomiyama
Yusuke Kobayashi
Mitsuru Tsuda
Tohru Higuchi
Keywords:
Doping
Materials science
Thin film
Sputter deposition
Optoelectronics
Correction
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