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In-Situ Measurement of Outgassing Generated from EUV Metal Oxide Nanoparticles Resist During Electron Irradiation
In-Situ Measurement of Outgassing Generated from EUV Metal Oxide Nanoparticles Resist During Electron Irradiation
2018
Seiji Takahashi
Hiroko Minami
Yoko Matsumoto
Yoichi Minami
Mikio Kadoi
Atsushi Sekiguchi
Takeo Watanabe
Keywords:
Oxide
Electron beam processing
Nanoparticle
Resist
Metal
In situ
Outgassing
Photochemistry
Materials science
Extreme ultraviolet lithography
metal oxide nanoparticles
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