Emission properties of targets based on shock waves excited by pulsed laser radiation

Abstract The results from studying extreme ultraviolet emission spectra of targets based on shock waves upon excitation by pulsed laser radiation are discussed in this work. A shock wave is formed during a head-on collision of supersonic gas jets formed by supersonic conical nozzles. For excitation, we used a Nd:YAG laser with λ = 1064 nm, τ = 5 ns and Eimp = 0.8 J. The investigated spectral range is 90–200 A. The emission spectra of Ar, Kr, N2 and CO2 are explored. The obtained emission spectra are decoded and the emitting ions determined. As a result, we are able to draw a conclusion regarding the applicability of these targets as sources of extreme ultraviolet radiation.