Device, equipment and method for measuring breakdown voltage

The invention provides a device, equipment and method for measuring the breakdown voltage. The device comprises a controlled voltage source, a current detection circuit and a processing circuit, wherein the output end of the controlled voltage source is connected with the input end of a sensor unit, and the controlled voltage source is used to provide a series of test offset voltages for the sensor unit; the input end of the current detection circuit is connected with the output end of the sensor unit, and the current detection circuit used to detect current signals output by the sensor unit and generate corresponding detection signals; and the input end of the processing circuit is connected with the output end of the current detection circuit, the output end of the processing circuit is connected with the input end of the controlled voltage source, and the processing circuit is used to control the series of test offset voltages provided by the controlled voltage, calculate dark currents corresponding to the series of test offset voltages based on the detection signals, and determine the breakdown voltage of the sensor unit based on the series of test offset voltages and the dark currents. According to the invention, the breakdown voltage of the sensor unit can be determined rapidly, accurately and efficiently.