Smart Platform for Microvibration Control of High-Tech Industry Facilities

Recently, the microvibrations of high technology facilities resulting from nearby traffic loads have attracted significant attention. Considerable research aimed at protecting high-tech equipment due to nearby road and rail traffic has focused on vibration isolation systems. These isolation systems include passive-base isolation systems, smart base isolation systems, passive mounts, and active tables that are used mainly to isolate a small quantity of high-tech equipment. In this study, a smart platform was developed to control the microvibrations of high-technology facilities. Train-induced ground acceleration was generated as a nearby traffic load and a magnetorheological damper was used to compose a smart isolation platform. A fuzzy logic controller was used as a control algorithm that was optimized using a multi-objective genetic algorithm. The microvibration control performance of a smart isolation platform was compared with that of a conventional passive isolation platform. A series of parametric studies were performed to optimize the design of a passive isolation platform. Numerical analysis showed that a smart isolation platform can effectively control the microvibrations of a high-technology facility subject to train-induced excitation.