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Acemap > Paper > Ru/TiO2/ZrO2/TiN (RIT-TiO2/ZrO2) Capacitor Structure for the 50nm DRAM Device and beyond

Ru/TiO2/ZrO2/TiN (RIT-TiO2/ZrO2) Capacitor Structure for the 50nm DRAM Device and beyond

2007 
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