상온 진공 분말 분사공정에 의해 제조된 TiO₂ 광촉매 막의 두께변화에 따른 광촉매 특성

TiO₂ is an environment-friendly semiconducting material, and it has photocatalytic and hydrophilic effect. There are a lot of reports on the photocatalytic characteristics of TiO₂, such as organic pollutants resolving, anti-bacterial, and self-purification material. In this paper, TiO₂ micron-sized powders were deposited on the glass by room temperature powder spray in vacuum process, so called aerosol deposition (AD), and nano-grained TiO₂ photocatalytic thin films were fabricated. The thickness of the films were controlled by changing the number of deposition cycle. Morphologies and characteristics of the AD-TiO₂ thin films were examined by SEM, TEM, XRD, and UV-Visible Spectrophotometer. As the thickness of TiO₂ films increased, surface roughness increased. By this increment, the reaction area between film and pollutant was enlarged, resulting in better photocatalytic property.