Research on the surface scattering properties of optical films by the total integrated scatter

The root mean square （RMS） roughness and surface scattering of Ag films，Y 2 O 3 -stabilized ZrO 2 films，TiO 2 films，and 1064 nm & 532 nm two-wavelength-reflection-reducing films are studied respectively by the total integrated scatter. Considering the preparation condition，growth process，material composition，and optical characteristics of the samples，the above measurement results are explained reasonably.