Old Web
English
Sign In
Acemap
>
Paper
>
High-Temperature Annealing Induced He Bubble Evolution in Low Energy He Ion Implanted 6H-SiC
High-Temperature Annealing Induced He Bubble Evolution in Low Energy He Ion Implanted 6H-SiC
2017
Yu-Zhu Liu
Bingsheng Li
Li Zhang
Keywords:
Bubble
Atomic physics
Annealing (metallurgy)
Physics
Ion
low energy
Correction
Source
Cite
Save
Machine Reading By IdeaReader
19
References
11
Citations
NaN
KQI
[]