Fabrication of high-Q Ge28Sb12Se60 chalcogenide microring resonators in telecommunication band

Zhen Yang,Mingyue Zhao,Rizhen Zhang,Peipeng Xu,Rongping Wang

Fabrication of high-Q Ge28Sb12Se60 chalcogenide microring resonators in telecommunication band

2020

Zhen Yang
Mingyue Zhao
Rizhen Zhang
Peipeng Xu
Rongping Wang

We fabricated a Ge28Sb12Se60 chalcogenide microring resonators with an intrinsic quality factor of 3.97×104, which corresponds to a propagation loss of 3.4 dB/cm. The nonlinear coefficient was determined to be≈122 W-1m-1.

Keywords:

Resonator
Optoelectronics
Fabrication
Germanium
wavelength conversion
Electron-beam lithography
Materials science
Refractive index
Chalcogenide
nonlinear coefficient

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