Effect of nitrogen addition to ozone generation characteristics by diffuse and filamentary dielectric barrier discharges at atmospheric pressure

Ozone is widely used for gas treatment, advanced oxidation processes, microorganisms inactivation, etc. In this research, we investigated the effect of nitrogen addition to ozone generation characteristics by atmospheric pressure Townsend discharge (APTD) type and filamentary dielectric barrier discharge (DBD) type ozone generators. The result showed that the ozone generated by the filamentary DBD increases rapidly with the increase of O 2 content, and is higher than that by the APTD. On the other hand, it is interesting that the ozone generated by the APTD gradually decreases with the increase of O 2 content. In order to clarify why the characteristics of ozone generation by the two kinds of discharge modes showed different dependency to the N 2 content, we analyzed the exhaust gas composition using FTIR spectroscopy and calculated the rate coefficients using BOLSIG+ code. As a result, we found that although O 2 content decreased with increasing N 2 content, additional O atoms produced by excited N 2 molecules contribute to ozone generation in case of APTD.