Demonstration of High Quality Factor Aluminum Nitride on Sapphire Microring Resonators at Near Infrared and Green Wavelengths

Yi Sun,Walter Shin,Majid Aalizadeh,Ping Wang,David Arto Laleyan,Ayush Pandey,Xianhe Liu,Yuanpeng Wu,Anshuman Singh,Mohammad Soltani,Zetian Mi

Demonstration of High Quality Factor Aluminum Nitride on Sapphire Microring Resonators at Near Infrared and Green Wavelengths

2020

Yi Sun
Walter Shin
Majid Aalizadeh
Ping Wang
David Arto Laleyan
Ayush Pandey
Xianhe Liu
Yuanpeng Wu
Anshuman Singh
Mohammad Soltani
Zetian Mi

We demonstrate high quality factor (Q) ring resonators near 780 nm wavelength (Q ~170000), and at 532 nm green wavelength (Q ~100,000) using aluminum nitride on sapphire platform.

Keywords:

Nitride
Resonator
Near-infrared spectroscopy
Optoelectronics
Sapphire
Wavelength
Aluminium
Materials science

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