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B6.4 Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids
B6.4 Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids
2021
D. Platz
A. Gesing
U. Schmid
Keywords:
Molecular vibration
Optoelectronics
Resonator
Materials science
Microelectromechanical systems
spectral response
Correction
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