p-type diamond Schottky diodes applications and materials science fabricated by vacuum ultraviolet light/ozone surface oxidation: Comparison with diodes based on wet-chemical oxidation

We investigated the performance of Schottky diodes fabricated on diamond surface oxidized by two different techniques. A detailed comparison shows vacuum ultraviolet (VUV) light technique has better performance than the standard wet chemical technique: ideality factor and Schottky barrier height are more reproducible and leakage current is lower, suggesting VUV light oxidation method improves the controllability and the homogeneity of the surface electronic properties.