A highly testable and diagnosable fabrication process test chip

We present the concept and prototype of the Logic Test Vehicle (LTV), a novel tool for ramp-up, qualification and monitoring of semiconductor fabrication processes. The LTV overcomes some of the known shortcomings of SRAM test vehicles used today for these purposes. It employs test circuitry which is more complex and more representative of the complexities found on real products yet retains testability and diagnosability, the two most important attributes required of test vehicles.