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Material Aspects and Challenges for SOI FinFET Integration
Material Aspects and Challenges for SOI FinFET Integration
2008
Mark Van Dal
Georgios Vellianitis
Ray Duffy
Gerben Doornbos
Bartek Pawlak
B. Duriez
Lhi-Shue Lai
Andriy Hikavyy
Tom Vandeweyer
Marc Demand
E. Altamirano
Rita Rooyackers
Liesbeth Witters
Nadine Collaert
Malgorzata Jurczak
M. Kaiser
R. G. R. Weemaes
Rob Lander
Keywords:
Electronic engineering
Silicon on insulator
Materials science
Engineering physics
soi finfet
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