Carbon-doped InAl(Ga)As for high speed laser diode

Carbon doping in an InAlAs material system grown by LP-MOVPE has been studied. Reduction of oxygen in carbon-doped InAlAs has been achieved by investigating the incorporation mechanisms of carbon and oxygen. The effect of removal of oxygen by bromine has also been found for the first time. Through use of these growth procedures, we have successfully made a C-doped InAlAs with low oxygen contamination. In the C-InAlAs layer, no electrical compensation was found. Finally, high power laser operation over 50 mW has been demonstrated with a C-InAlAs SCH layer, which was located close to the active region. No degradation after the excess current injection was confirmed. In conclusion, C-doped InAlAs layers with low oxygen contamination have superior electrical and optical qualities and are promising for application in high speed laser diodes.