A 3-D MEMS optical switch for OXCs

A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components. A prototype with 100-ch I/Os features a coupling loss of 4.0dB and switching time of 3ms.