Templating Nanopores Into Poly(MethylSilsesquioxane): New Lowdielectric Coatings Suitable for MicroElectronic Applications

Thin films of nanoporous poly(methylsilsesquioxane) have been prepared from organic/inorganic polymer hybrids. Low molecular weight 6-arm star poly(caprolactone)s are incorporated into partially pre-condensed methylsilsesquioxane resin. Upon heating, the glass resin cross-links around the organic polymer templates. Thermal decomposition of the orgainc polymer produces nanoporous thin films which show tunable dielectric constants as low as 1.9 and exhibit properties suitable for use in interconnect devices. Experimental data including porosity, morphology, and dielectric constants are presented.